{"id":347,"date":"2013-09-09T02:18:08","date_gmt":"2013-09-08T18:18:08","guid":{"rendered":"https:\/\/hsieh.mem.nsysu.edu.tw\/?page_id=347"},"modified":"2018-12-24T10:59:53","modified_gmt":"2018-12-24T02:59:53","slug":"%e7%b6%ad%e6%b8%a0%e9%81%93%e6%b8%ac%e8%a9%a6%e7%92%b0%e8%b7%af%e6%b0%a3%e9%ab%94","status":"publish","type":"page","link":"https:\/\/mhtrl.com\/?page_id=347","title":{"rendered":"\u5fae\u6e20\u9053\u6e2c\u8a66\u74b0\u8def(\u6c23\u9ad4)"},"content":{"rendered":"<p><strong>\u6b64\u4e00\u74b0\u8def\u6e2c\u8a66\u7cfb\u7d71\u4e3b\u8981\u7528\u4f86\u5f9e\u4e8b\u5fae\u6d41\u9ad4\u6d41\u52d5\u4e4b\u76f8\u95dc\u6578\u64da\u64f7\u53d6\uff0c\u85c9\u4ee5\u5206\u6790\u5176\u7269\u7406\u554f\u984c\uff0c\u4e26\u5c07\u6240\u5f97\u7d50\u679c\u8207\u89e3\u6790\u89e3\u53caDSMC\u6cd5\u4f5c\u6bd4\u8f03\u3002\u6574\u9ad4\u6e2c\u8a66\u7cfb\u7d71\u5982\u5716\u4e00\u6240\u793a\uff0c\u74b0\u8def\u5165\u53e3\u9023\u63a5\u9ad8\u58d3\u6e2c\u8a66\u6c23\u9ad4\uff0c\u5206\u5225\u85c9\u7531\u58d3\u529b\u8abf\u7bc0\u95a5\u63a7\u5236\u9032\u6c23\u58d3\u529b\u53ca\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668(Mass flow controller)\u63a7\u5236\u6d41\u91cf\uff0c\u70ba\u4e86\u9632\u6b62\u5fae\u7c92\u5b50\u9032\u5165\u5fae\u6e20\u9053\u9020\u6210\u5835\u585e\uff0c\u56e0\u6b64\uff0c\u5728\u6e2c\u8a66\u5340\u4e4b\u524d\u52a0\u88dd\u5fae\u904e\u6ffe\u5668(Micro filter; \u53ef\u904e\u6ffe\u81f30.003\u03bcm\u5fae\u7c92)\u4fdd\u6301\u6c23\u9ad4\u4e4b\u6e05\u6de8\u5ea6\uff0c\u70ba\u63a7\u5236\u76f8\u95dc\u5be6\u9a57\u53c3\u6578(Qin, Re, Pin\u2026..)\uff0c\u5728\u74b0\u8def\u8207\u6e2c\u8a66\u5340\u9032\u53e3\u8655\u9023\u63a5\u5fae\u8cea\u91cf\u6d41\u91cf\u8a08(Micro mass flow meter; Range=0~10 SCCM)\u8b80\u53d6\u6d41\u91cf\u503c\uff0c\u800c\u5728\u6e2c\u8a66\u5340\u9032\u51fa\u53e3\u4e4b\u9593\u9023\u63a5\u5fae\u58d3\u529b\u50b3\u9001\u5668(Micro pressure transducer)\u91cf\u6e2c\u58d3\u964d\u3002\u6e2c\u8a66\u7528\u4e4b\u5fae\u6e20\u9053\u5247\u4f7f\u7528\u6fd5\u8755\u523b\u88fd\u7a0b\u6280\u8853(Wetetching process technology)\u88fd\u4f5c\uff0c\u5982\u5716\u4e8c\u6240\u793a\u3002<\/strong><\/p>\n<table border=\"0\">\n<tbody>\n<tr>\n<td style=\"text-align: center;\"><strong>\u5716\u4e00<\/strong><\/td>\n<td style=\"text-align: center;\"><strong>\u5716\u4e8c<\/strong><\/td>\n<\/tr>\n<tr>\n<td style=\"text-align: center;\"><strong><a href=\"https:\/\/mhtrl.com\/wp-content\/uploads\/2013\/08\/6-0_6_large.jpg\"><img decoding=\"async\" loading=\"lazy\" alt=\"\u7dad\u6e20\u9053\u6e2c\u8a66\u74b0\u8def(\u6c23\u9ad4)-1\" src=\"https:\/\/mhtrl.com\/wp-content\/uploads\/2013\/08\/6-0_6_large-300x223.jpg\" width=\"300\" height=\"223\"><\/a><\/strong><\/td>\n<td style=\"text-align: center;\"><strong><img decoding=\"async\" loading=\"lazy\" alt=\"\u7dad\u6e20\u9053\u6e2c\u8a66\u74b0\u8def(\u6c23\u9ad4)-2\" src=\"https:\/\/mhtrl.com\/wp-content\/uploads\/2013\/08\/6-0_7_large-300x219.jpg\" width=\"300\" height=\"223\"><\/strong><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>\u6b64\u4e00\u74b0\u8def\u6e2c\u8a66\u7cfb\u7d71\u4e3b\u8981\u7528\u4f86\u5f9e\u4e8b\u5fae\u6d41\u9ad4\u6d41\u52d5\u4e4b\u76f8\u95dc\u6578\u64da\u64f7\u53d6\uff0c\u85c9\u4ee5\u5206\u6790\u5176\u7269\u7406\u554f\u984c\uff0c\u4e26\u5c07\u6240\u5f97\u7d50\u679c\u8207\u89e3\u6790\u89e3\u53caDSMC\u6cd5\u4f5c\u6bd4<\/p>\n<footer><a title=\"\u5fae\u6e20\u9053\u6e2c\u8a66\u74b0\u8def(\u6c23\u9ad4)\" id=\"read-more\" href=\"https:\/\/mhtrl.com\/?page_id=347\"><i class=\"icon\"><\/i>Read More<\/a><\/footer>\n","protected":false},"author":1,"featured_media":31,"parent":237,"menu_order":4,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_links_to":"","_links_to_target":""},"_links":{"self":[{"href":"https:\/\/mhtrl.com\/index.php?rest_route=\/wp\/v2\/pages\/347"}],"collection":[{"href":"https:\/\/mhtrl.com\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/mhtrl.com\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/mhtrl.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/mhtrl.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=347"}],"version-history":[{"count":5,"href":"https:\/\/mhtrl.com\/index.php?rest_route=\/wp\/v2\/pages\/347\/revisions"}],"predecessor-version":[{"id":3322,"href":"https:\/\/mhtrl.com\/index.php?rest_route=\/wp\/v2\/pages\/347\/revisions\/3322"}],"up":[{"embeddable":true,"href":"https:\/\/mhtrl.com\/index.php?rest_route=\/wp\/v2\/pages\/237"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/mhtrl.com\/index.php?rest_route=\/wp\/v2\/media\/31"}],"wp:attachment":[{"href":"https:\/\/mhtrl.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=347"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}